ANU Nanotechnology Cleanroom Access: How to Pass the Contamination Control Exam and Book Equipment Time

22 May 2026 3 min read

The ANU Nanotechnology Cleanroom at the Australian National University (ANU) is a core part of the university’s physics and engineering research infrastructure, open to the whole university and to external partner institutions. The key entry requirement is passing the Contamination Control Exam, designed by ANU Safety & Risk, which has assessed more than 1,200 users since 2018 [ANU Safety & Risk, 2023, Cleanroom Access Training Records]. According to the 2024 ANU Research Infrastructure annual report, equipment bookings in the cleanroom totalled 8,760 hours for the year, with around 35% of bookings cancelled or delayed because users had not passed the Contamination Control Exam [ANU Research Infrastructure, 2024, Annual Facility Usage Report]. For staff and students planning micro-nano fabrication, semiconductor device or biosensor research at ANU, mastering the cleanroom access process and equipment booking system is the key to shortening experiment cycles and avoiding wasted resources.

Overview of the Cleanroom Access System

The ANU Nanotechnology Cleanroom is a mixed clean environment of ISO Class 5 (Class 100) and ISO Class 7 (Class 10,000), with strict limits on particle concentration. Under facility management rules, every user must complete three mandatory steps before gaining independent operating access: pass the Contamination Control Exam, complete safety training (including the chemical safety and laser safety modules), and sign the equipment use agreement. The system follows the Australian standard AS/NZS ISO 14644-1:2019, and the exam covers three modules: identifying particle contamination sources, cleanroom gowning procedures, and emergency response procedures.

Exam Content and Pass Standard

The Contamination Control Exam combines an online and an in-person component. The online part contains 40 multiple-choice questions covering cleanroom code of conduct (such as the ban on paper, cosmetics and non-cleanroom pens), material entry rules (such as the ban on uncertified polymers in Class 5 areas) and chemical waste disposal procedures. The in-person part is a practical assessment covering the correct order for putting on a bunny suit, the steps for using the air shower, and how often gloves must be changed. The exam is scored out of 100, with a pass mark of 85, and you must not score zero on any single item in the practical component. According to 2023 statistics, the first-attempt pass rate is about 62%, and those who fail must wait 14 days before rebooking [ANU Safety & Risk, 2023, Cleanroom Training Statistics].

Training Resources and Revision Materials

ANU provides official revision materials, including a 25-page Cleanroom User Manual and an 18-minute instructional video, both available in the “Research Infrastructure” course module on the ANU Wattle platform (the learning management system). In addition, the College of Physics and Engineering runs two 90-minute in-person Q&A workshops per semester, hosted by cleanroom technicians. Before booking the exam, users are advised to spend at least 6 to 8 hours of self-study, focusing on particle size classification (for example, the permitted concentration difference between 0.5μm and 5.0μm particles) and the air pressure gradient requirements between different classification areas.

Equipment Booking System and Operating Procedure

After passing the Contamination Control Exam, users book equipment through the ANU Facility Booking System (FBS). The system is built on the iLab Solutions platform and integrates with the ANU single sign-on (SSO). On first login, users must complete the “equipment certification” step: for each specific instrument (such as the electron beam lithography system, the reactive ion etcher and the atomic layer deposition system), you must separately pass that instrument’s operating training and assessment. As of the end of 2024, the cleanroom had 37 bookable instruments, of which the electron beam lithography system (Raith EBPG 5000+) had the longest booking lead time, averaging 21 business days [ANU Research Infrastructure, 2024, Equipment Utilization Report].

Booking Priority and Quota System

Equipment bookings use a tiered quota system. Academic users (current ANU students, postdocs and staff) can book a base allocation of 12 hours per week, while industrial users (external companies) get 8 hours per week. Bookings in peak periods (Monday to Friday, 9:00-17:00) must be submitted at least 48 hours in advance, while off-peak periods (18:00-8:00 and weekends) can be booked 24 hours ahead. If a user fails to show up for three consecutive bookings without cancelling at least 2 hours before the start time, their booking privileges are frozen for 30 days. 2024 data shows that around 8% of bookings were wasted through no-shows, with the reactive ion etcher (Oxford Instruments Plasmalab 100) having the highest no-show rate at 12.3%.

Equipment Usage Charges

Cleanroom usage fees vary by equipment type and user tier. ANU internal academic users are charged AUD 35 to AUD 120 per hour (depending on equipment complexity), external academic users (other Australian universities) AUD 70 to AUD 240, and industrial users AUD 150 to AUD 500. Fees are settled via the ANU internal order system or external invoicing. When it comes to paying cross-border tuition, some student families use dedicated channels such as Flywire tuition payments to complete their remittances, but cleanroom fees must be processed directly through the ANU finance system and cannot be paid via third-party payment platforms.

Cleanroom Safety and Emergency Management

Cleanroom safety management is overseen by ANU Safety & Risk and follows the Australian Work Health and Safety Act (WHS Act 2011). Before entering the cleanroom, all users must complete the chemical safety module (covering the handling of hazardous substances such as HF acid, chlorine gas and silane) and the laser safety module (covering Class 3B and Class 4 laser operation). The cleanroom is equipped with emergency eyewash stations, chemical fume hoods and an automatic fire suppression system, and a full emergency drill is held every quarter.

Chemical Waste Disposal Procedure

Chemical waste generated in the cleanroom (such as photoresist developer and metal etching waste liquid) must be strictly segregated. Users must transfer waste to the designated yellow waste containers (organic solvents) or red containers (acidic waste liquid) within 30 minutes of finishing an experiment, and fill in the waste label (including chemical name, concentration, volume and date). The ANU Environmental Health and Safety Office (EHS Office) collects waste every Friday morning, and users who breach the rules face a 48-hour facility ban. In 2023 there were 17 waste segregation violations, of which mixing acetone with isopropanol was the most common error.

Common Equipment Operating Procedures

Every piece of equipment has a standard operating procedure (SOP), and users must pass an oral assessment with the equipment manager before first use. Below are the operating essentials for the three most frequently used instruments.

Electron Beam Lithography System (EBL)

The Raith EBPG 5000+ electron beam lithography system is the cleanroom’s core instrument, used for nanoscale patterning. Before operating, confirm the electron beam current stability (fluctuation no more than ±2%) and calibrate the stage position (accuracy ±10nm). After every use, users must record the electron gun vacuum level (standard value: <1×10⁻⁶ mbar) and the beam spot size. The filament needs replacing every 200 operating hours, carried out by the equipment manager.

Reactive Ion Etcher (RIE)

The Oxford Instruments Plasmalab 100 RIE is used for dry etching of silicon, silicon dioxide and metal films. Operating parameters include RF power (50-300W), chamber pressure (10-100 mTorr) and gas flow rates (e.g. SF₆: 20-50 sccm). Users must run a 30-second argon plasma clean before etching to remove chamber residue. Equipment logs show four equipment downtime events in 2024 caused by incorrect gas flow settings, with an average repair time of 6 hours.

Atomic Layer Deposition System (ALD)

The Cambridge Nanotech Savannah S100 ALD is used to deposit high-dielectric-constant films (such as Al₂O₃ and HfO₂). Before operating, confirm the precursor temperatures (e.g. TMA: 20°C, H₂O: 20°C) and the pulse times (typically 0.015 seconds). Each deposition cycle must be followed by a nitrogen purge (flow rate: 20 sccm, duration: 10 seconds). Film thickness is monitored in situ with an ellipsometer, and target thickness deviation must be kept within ±5%.

Maintaining and Renewing Access

Cleanroom access is not permanent. Every 12 months users must retake the Contamination Control Exam (online part) and renew their safety training certificate (valid for 12 months). If a user has not used the cleanroom for 6 consecutive months, their equipment certification automatically lapses and they must pass the operating assessment again. 2024 data shows that around 15% of users had their access interrupted because they did not retake the exam on time, with an average recovery time of 5 business days [ANU Safety & Risk, 2024, Access Renewal Report].

Path to Advanced Access

Users who need to operate higher-hazard equipment (such as Class 4 lasers or high-pressure reaction chambers) must additionally complete Advanced Operator Training, delivered one-on-one by the equipment manager and totalling no less than 8 hours. After completing the training, users gain “advanced user” status, with extended booking windows (18 hours per week) and priority access to off-peak slots. As of the end of 2024, the cleanroom had 47 advanced users, accounting for 18% of active users.

FAQ

Q1: Can I retake the Contamination Control Exam? How long do I have to wait?

Yes, but you must wait 14 days before rebooking. Users who fail the first attempt (scoring below 85) pay an AUD 50 administration fee for the second attempt. The third and subsequent attempts cost AUD 100 each. 2023 data shows that about 23% of users passed on the second attempt, while 5% needed three or more attempts.

Q2: How do external researchers apply for cleanroom access?

External researchers must first contact the ANU Research Infrastructure Office to submit an access application, along with a research proposal and risk assessment report. Approval typically takes 10 business days. Once approved, users must complete the same Contamination Control Exam and safety training as internal users. External academic users (from other Australian universities) are charged 2 times the internal rate, and industrial users 4 times.

Q3: Can I cancel an equipment booking at short notice? What is the cancellation policy?

Yes, but you must cancel through the FBS system at least 2 hours before the booking start time. Cancelling within 2 hours or failing to show up counts as one “no-show”. Three consecutive no-shows freeze your booking privileges for 30 days. 2024 data shows the highest no-show rate was on Friday afternoons (17:00-20:00), accounting for 18% of all no-shows.

References

ANU Safety & Risk. 2023. Cleanroom Access Training Records.
ANU Research Infrastructure. 2024. Annual Facility Usage Report.
ANU Safety & Risk. 2023. Cleanroom Training Statistics.
ANU Research Infrastructure. 2024. Equipment Utilization Report.
UNILINK Education. 2024. ANU Research Facility Access Database.